01 — Shower Head
300mm Flat Type
Standard 300mm showerhead.
300mm MD Type
Showerhead with 26T hole-depth structure.
300mm Arc Type
Arc structure with thick wings.
Detachable Type
Modular, detachable design — maintainability first.
Welding Type
E-beam welded one-piece type — blocks micro leakage.
Dual Type
Dissimilar-material bonding with e-beam welding against micro leakage.
02 — Core Parts
Gas Box
Gas distribution/shut-off unit — integrated by e-beam welding.
Susceptor (Inner / Outer)
Wafer heating plate — e-beam welded to minimize distortion, 0.02mm flatness tolerance.
Liner
Chamber wall liner — plasma-resistant machined surface.
Plate
Upper/lower equipment plates — flatness and parallelism managed together.
Baffle
Gas flow control part — optimized micro-hole distribution.
03 — Parts
Housing — Cooling / Vacuum
Housing module with integrated cooling lines — precision assembly and leak testing included.
Ring / Isolator
Precision-machined rings and insulation parts for chambers.
Plate
Precision-machined plates for equipment.
Insulator
Precision parts for high-voltage insulation.